In industries where ultra-high cleanliness is critical—such as semiconductors, flat panel displays, photovoltaics, biopharmaceuticals, and high-end chemical processing—the maintenance and regeneration of cartridge filters directly impact process stability and product yield. The 20L Filter Cartridge Soaking Cabinet (Model: WL-20Lvx) developed by Xinruiwei Semiconductor Technology (Suzhou) Co., Ltd. is designed to meet these demanding requirements with a safe, efficient, and cost-effective solution.
Equipment Overview
The 20L filter cartridge soaking cabinet is primarily used for IPA soaking, DI water cleaning, and nitrogen drying of 20-liter cartridge filters made of PFA or PVDF. Each process cycle allows up to 10 filter cartridges to be soaked simultaneously, significantly improving maintenance efficiency for expensive filtration components.
After soaking, waste IPA is discharged via gravity into organic waste liquid pipelines, while cleaning wastewater is routed to organic wastewater pipelines. This design ensures compliance with cleanroom safety and environmental management standards.
Key Technical Specifications
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Equipment Name: 20L Filter Cartridge Soaking Cabinet
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Model: WL-20Lvx
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Capacity: 10 × 20L filter cartridges per batch
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Filter Size: Length 545 mm, Diameter 68.5 mm
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Time Setting: Adjustable from 0 to 12 hours
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Operating Mode: Manual operation
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Dimensions (Reference): 1400 × 1200 × 2000 mm (L × W × H, excluding exhaust valve)
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Design Capacity: Two-shift operation, 24 hours/day, 360 days/year
The equipment is designed to operate in cleanroom environments with a temperature of 23 ± 2°C and relative humidity below 60%.
Process Flow and Functional Layout
The soaking cabinet features a left-to-right process layout, improving workflow efficiency and operator convenience:
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Left Side: IPA soaking station
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Right Side: DI water cleaning and N₂ drying station
The system consists of electrical control, piping, wet process area, exhaust system, and upper/lower sliding doors to ensure operational safety and containment.
IPA Soaking Station (#1)
The IPA soaking station uses a static soaking process with a SUS316L EP sealed fixture, capable of holding 10 cartridges in two layers. IPA is pumped from storage into the soaking fixture using a diaphragm pump, ensuring controlled and contamination-free liquid handling.
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Tank Material: SUS316L
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Liquid Medium: IPA
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Drainage: Gravity discharge
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Piping & Valves: PFA fittings and valves for chemical compatibility
After soaking, IPA is drained back to the storage system, while residual wastewater is discharged through designated outlets.
DI Water Cleaning and N₂ Drying Station (#2)
The second station focuses on post-soak cleaning and drying:
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Cleaning Method: DI water spray gun
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Drying Method: Nitrogen blow gun
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Tank Material: 10 mm NPP welded structure
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Operating Temperature: Room temperature
This station ensures complete removal of IPA residues and moisture, restoring the filter cartridges for reuse in high-purity processes.
Safety and Protection Design
Safety is a core design principle of the WL-20Lvx system. Key safety features include:
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Explosion-proof structural frame
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Nitrogen and compressed air pressure alarms
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Leak detection sensors in piping and drip tray areas
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Enclosed sliding doors with transparent PVC windows to prevent vapor leakage
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Automatic fire suppression system, including gas cylinders, temperature sensors, smoke detectors, and spray heads
These measures ensure stable operation and protect both personnel and facilities.
Electrical and Utility Configuration
The equipment uses a manual control system with mechanical push buttons, offering simplicity and reliability. Electrical components are protected against corrosion, moisture, and leakage, with comprehensive grounding and emergency shutdown systems.
Utility requirements include:
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Power Supply: 220VAC ±10%, 50Hz, single phase
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Rated Power: Approx. 2 kW
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DI Water: DN25, 3–5 kg/cm², max flow 2 m³/h
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Gas Supply: N₂ or compressed air, 0.5–0.7 MPa
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Exhaust: DN200
High-Quality Materials and Components
The cabinet is constructed primarily from SUS304 and SUS316 stainless steel, ensuring long-term resistance to organic solvents and corrosive environments. Key components are sourced from reliable suppliers, including SMC, CKD, Schneider, Trebor, and Innodis, ensuring stable performance and easy maintenance.
Conclusion
The 20L Filter Cartridge Soaking Cabinet WL-20Lvx from Xinruiwei Semiconductor Technology (Suzhou) Co., Ltd. provides a practical and dependable solution for regenerating high-value cartridge filters in ultra-clean manufacturing environments. With its robust materials, thoughtful safety design, and efficient process layout, it helps users reduce operating costs, extend filter life, and maintain consistent process cleanliness.
For facilities seeking a cost-effective, safe, and industry-compliant filter maintenance solution, this system represents a strong and reliable choice.
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Xinruiwei Semiconductor Technology (Suzhou) Co., Ltd.
